SYNTHESIS OF PASSIVATING STRUCTURES OF MULTILAYER THIN-FILM RESISTORS 

Vitaly S. Mamontov, Associate professor of the sub-department of radio equipment design and production, Penza State University (40 Krasnaya street, Penza, Russia), kipra@pnzgu.ru
Sergey A. Gurin, Candidate of technical sciences, head of the laboratory,  Scientific Research Institute of Electronic and Mechanical Devices (44 Karakozova street, Penza, Russia), teslananoel@rambler.ru
Maksim D. Novichkov, Postgraduate student, Penza State University (40 Krasnaya street, Penza, Russia); process engineer, Scientific Research Institute of Electronic and Mechanical Devices (44 Karakozova street, Penza, Russia), novichkov1998maks@gmail.com
Dmitry V. Agafonov, Master degree student, Penza State University (40 Krasnaya street, Penza, Russia); design engineer, Scientific Research Institute of Electronic and Mechanical Devices (44 Karakozova street, Penza, Russia), dmitryagafonov@list.ru
Kamila L. Zakirova, Master degree student, Penza State University (40 Krasnaya street, Penza, Russia),Zakirovacamila@yandex.ru

Background. The relevance of this study is related to the development of radioelectronic equipment, which requires improvement of the electrical parameters of electronic components, including time and temperature stability. Materials and methods. The processes occurring in the structure of thin films leading to a change in the resistance of a thinfilm resistor over time are investigated. Results. The technology of synthesis of thin-film resistors with a protective coating and the parameters determining the materials of thin films and their sequence are presented. Conclusions. The developed technology makes it possible to achieve values of TCR of thin-film resistors in the range ± 3 1/ °C.

thin-film resistor, resistance, temporary stability, temperature compensation, passivating structure

Mamontov V.S., Gurin S.A., Novichkov M.D., Agafonov D.V., Zakirova K.L. Synthesis of passivating structures of multilayer thin-film resistors. Izmerenie. Monitoring. Upravlenie. Kontrol' = Measuring. Monitoring. Management. Control. 2025;(2):43–48. (In Russ.). doi: 10.21685/2307-5538-2025-2-5